3-D Roughness Analyzer

Birdseye image of pyramidal image [Click image for larger size] A+B image of pyramidal wafer at 800x [Click image for larger size] A-B image of pyramidal wafer at 800x [Click image for larger size] Contour map image of pyramidal image [Click image for larger size] Line plot across center 4 peaks of pyramidal image [Click image for larger size]

3-D Roughness Analyzer

In this example, a SEM image and topographic image of a pyramidal wafer were taken, then a Birdseye or 3D colored image was obtained (which can be rotated or tilted), followed by a Contour map.

Up to 15 roughness parameters (Ra, Rz, etc) may then be calculated. A line plot may be obtained across any direction from the Birdseye/Contour images to determine height (z) and surface distance measurements.

The e-RAM (Electron Roughness Analyzing Microscope) is the first true FESEM specifically developed for the 3D quantitative analysis of surface roughness (R) measurements.  The e-RAM is a unique SEM with four secondary electron detectors which are paired off into signals A+B, which can offer one nanometer vertical resolution. 
 

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SEMTech Solutions, Inc. ~ 6 Executive Park Drive ~ North Billerica, MA 01862

Tel: (978) 663-9822 x232 ~ labmanager@semtechsolutions.com